high-resolution photolithography

high-resolution photolithography
фотолитография высокого разрешения

The New English-Russian Dictionary of Radio-electronics. . 2005.

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  • Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

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  • Micro contact printing — Figure 1: PDMS master is created by patterning silicon, pouring and curing the PDMS, and peeling away from the substrate …   Wikipedia


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